Vacuum ultraviolet (VUV, 100–200 nm) light sources are indispensable for advanced spectroscopy, quantum research, and ...

Extreme ultraviolet lithography (EUVL) has emerged as a cornerstone technology in the semiconductor industry, enabling the production of devices with sub-10 nm feature sizes. By utilising a 13.5 nm ...

Japanese firm Nuvoton Technology has started mass production of its high-power UV semiconductor laser (379 nm, 1.0 W), which ...

New type of EUV lithography using only four reflective mirrors overturns conventional technology and will contribute to advanced semiconductors at 7nm and below Okinawa Institute of Science and ...

Building an integrated circuit (IC) requires various physical and chemical processes to be performed on a semiconductor (e.g., silicon) substrate. Millions of transistors can be fabricated and wired ...

A new ultraviolet laser source pushes maskless lithography closer to mainstream use in advanced semiconductor packaging by ...

(a) Schematic of the laser direct-writing system. (b) Vertical view of the cantilever of the SNOM tip. (c) Details of the pyramid tip structure and three-dimensional (3D) multiphysics model in the ...

Researchers review AI-powered inverse lithography, showing how deep learning boosts chip patterning precision and efficiency while facing scaling challenges. Computational lithography optimizes the ...

Few would expect the future of artificial intelligence (AI) to depend on Eindhoven, a quiet Dutch town. Yet just beyond its borders sits the headquarters of ASML, the only company that makes the ...

How Does EUV Lithography Work? EUV Lithography is a state-of-the-art technology in chip manufacturing that uses highly energetic ultraviolet light to carve detailed patterns onto semiconductor ...

"Image" is everything in the $20 billion market for AR/VR glasses. Consumers are looking for glasses that are compact and easy to wear, delivering high-quality imagery with socially acceptable optics ...