One important issue when designing with SADP/SAQP processes is how to lay out the boundary areas at the edges of an IP block, as defined by the SADP region marker. As shown in Figure 4, dummy ...
As any engineer who’s tried it can tell you, creating a design rule check (DRC)-compliant design for self-aligned multi-patterning (SAMP) processes is not a trivial matter. Decomposing the desired ...
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