If LPCVD polysilicon deposition has an activation energy of 1.6... | Filo
If LPCVD polysilicon deposition has an activation energy of 1.6... | Filo
6 months ago
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SOLVED: Polysilicon deposits at a rate of 30 Å/min at 540°C. What deposition rate can be expected at 625°C if the activation energy for film deposition is 1.65 eV?
SOLVED: Polysilicon deposits at a rate of 30 Ã…/min at 540°C. Wha…
Dec 16, 2023
numerade.com
SOLVED:Explain why the deposition temperature for polysilicon films is moderately low, usually between 600^∘-650^∘ C.
SOLVED:Explain why the deposition temperature for polysilicon films i…
May 26, 2021
numerade.com
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